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Residual Gas Analyzer
Real-time gas composition monitoring for vacuum systems, designed for semiconductor manufacturing and research applications.
Product Details
The mass spectrometer chamber is constructed from full stainless steel, with a maximum operating temperature of 200°C. A vacuum environment is maintained by an oil-free diaphragm pump and a high-performance turbo molecular pump. A full-range vacuum gauge is included for real-time monitoring of the instrument's vacuum status.